Davis Millimeter-Wave Research Center

Microwave/Millimeter Wave Technology

Plasma Diagnostics

 

 

RESEARCH  ACTIVITIES

Plasma diagnostics

 

µ-wave vacuum electronics

 

µ-wave solid state technology

 

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Director:
Prof. N.C. Luhmann, Jr.

 

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Microfabrication Laboratory

 

The Investigator’s group also has access to a 10,000 square feet, Class 100 microfabrication facility (NCNC). Housed within this facility is a plasma reactive ion etcher (Thermco Model 790 Plasma Processor) provided by UC Davis as cost sharing for the Investigator’s programs which supports deep ion etching of silicon micro­machined devices. In addition, a new focused ion beam system obtained under a successful DURIP proposal supports the etching of GaAs and InP devices. The Investigator also possesses a rapid thermal annealer and hot plate system for Ohmic contacts.

 

 

 

 

 

 

 

 

 

 

 

 

 

 

                           

 

 

 

 

 

 
 
 
 
              
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